AS ISO 14644.3:2021 Cleanrooms and associated controlled environments Part 3: Test methods.
This document provides test methods in support of the operation for cleanrooms and clean zones to meet air cleanliness classification, other cleanliness attributes and related controlled conditions.
Performance tests are specified for two types of cleanrooms and clean zones: those with unidirectional airflow and those with non-unidirectional airflow, in three possible occupancy states: as-built, at-rest and operational.
The test methods, recommended test apparatus and test procedures for determining performance parameters are provided. Where the test method is affected by the type of cleanroom or clean zone, alternative procedures are suggested.
For some of the tests, several different methods and apparatus are recommended to accommodate different end-use considerations. Alternative methods not included in this document can be used by agreement between customer and supplier. Alternative methods do not necessarily provide equivalent measurements.
This document is not applicable to the measurement of products or of processes in cleanrooms, clean zones or separative devices.
NOTE This document does not purport to address safety considerations associated with its use (for example, when using hazardous materials, operations and equipment). It is the responsibility of the user of this document to establish appropriate safety and health practices and to determine the applicability of regulatory limitations prior to use.
2 Normative references
There are no normative references in this document.
3 Terms and definitions
For the purposes of this document, the following terms and definitions apply.
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3.1 General terms
room within which the number concentration of airborne particles (3.2.1) is controlled and classified, and which is designed, constructed and operated in a manner to control the introduction, generation and retention of particles inside the room
Note 1 to entry: The class of airborne particle concentration (3.2.4) is specified.
Note 2 to entry: Levels of other cleanliness attributes such as chemical, viable or nanoscale concentrations in the air, and also surface cleanliness in terms of particle, nanoscale, chemical and viable concentrations might also be specified and controlled.
dilution system
system wherein aerosol is mixed with particle-free dilution air in a known volumetric ratio to reduce concentration
filter system
assembly composed of filter, frame and other support mechanism or other housing
final filter
filter in a final position before the air enters the cleanroom (3.1.1) or clean zone (3.1.2)
installed filter system
filter system (3.3.4) mounted in the ceiling, wall, apparatus or duct
installed filter system leakage test
test performed to confirm that the filters are properly installed by verifying that there is absence of bypass leakage of the filter installation (3.1.3), and that the filters and the grid system are free of defects and leaks (3.3.8)
penetration of contaminants that exceed an expected value of downstream concentration through lack of integrity or defects
method for disclosing leaks (3.3.8) in filters and parts of units, whereby the probe inlet of an aerosol photometer (3.6.2) or a light-scattering airborne-particle counter is moved in overlapping strokes across the defined test area.
AS ISO 14644.3 pdf download.