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IEC 63041-3-2020 PIEZOELECTRIC SENSORS – Part 3: Physical sensors. 3 Terms, definitions, symbols and units 3.1 Terms and definitions For the purposes of this document, the terms and definitions given in IEC 60027 (all parts), IEC 60050-561 , IEC 6061 7, IEC 63041 -1 , IEC 63041 -2 and ISO 80000-1 and the following apply. ISO and IEC maintain terminological databases for use in standardization at the following addresses: • IEC Electropedia: available at http://www.electropedia.org/ • ISO Online browsing platform: available at http://www.iso.org/obp 3.1.1 piezoelectric acceleration sensor element piezoelectric sensor component whose resonance frequency or delay is used to measure the change in velocity of an object with time 3.1.2 piezoelectric humidity sensor element piezoelectric sensor component whose resonance frequency or delay is used for dew point and moisture detection 3.1.3 piezoelectric tilt angle sensor element piezoelectric sensor component whose resonance frequency or delay is used to measure tilt angles, elevation, or depression of an object with respect to gravity’s detection 3.1.4 piezoelectric vibration sensor element piezoelectric sensor component whose resonance frequency or delay is used for measurement of vibration 3.1.5 dual mode sensor piezoelectric sensor which is able to detect physical quantities from a change in resonance frequencies of two independent modes on a single piezoelectric plate Note 1 to entry: In order to achieve improved precision and/or to eliminate undesired influence factors, sensor solutions are employed that utilize two or more modes. By evaluation of combinations of these modes’ sensitivities to various ambient conditions, on the one hand, improved detection sensitivity can be achieved, while, on the other hand, undesirable sensitivities can be reduced or eliminated. 3.1.6 differential sensor piezoelectric sensor which is able to detect physical quantities from a change in resonance frequencies or delays of two independent and same micro-acoustic structures assembled on the same or different piezoelectric plates 3.1.7 multi-measurand sensor piezoelectric sensor which is able to detect two or more different physical quantities from an analysis of different sensor responses 3.2 Symbols and units The symbols and units given in IEC 63041 -1 apply. 4 Specifications 4.1 General Key points of the specification are identified in IEC 63041 -1 :201 7, Clause 5. 4.2 Conceptual diagrams of sensor types 4.2.1 General In addition to the sensor types listed in IEC 63041 -1 :201 7, Clause 4, specific realizations are common for surface acoustic wave (SAW) sensors. 4.2.2 Conceptual diagram for sensor elements of SAW...

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