IEC 63041-3-2020 PIEZOELECTRIC SENSORS – Part 3: Physical sensors.
3 Terms, definitions, symbols and units
3.1 Terms and definitions
For the purposes of this document, the terms and definitions given in IEC 60027 (all parts), IEC 60050-561 , IEC 6061 7, IEC 63041 -1 , IEC 63041 -2 and ISO 80000-1 and the following apply.
ISO and IEC maintain terminological databases for use in standardization at the following addresses:
• IEC Electropedia: available at http://www.electropedia.org/
• ISO Online browsing platform: available at http://www.iso.org/obp
3.1.1 piezoelectric acceleration sensor element
piezoelectric sensor component whose resonance frequency or delay is used to measure the change in velocity of an object with time
3.1.2 piezoelectric humidity sensor element
piezoelectric sensor component whose resonance frequency or delay is used for dew point and moisture detection
3.1.3 piezoelectric tilt angle sensor element
piezoelectric sensor component whose resonance frequency or delay is used to measure tilt angles, elevation, or depression of an object with respect to gravity’s detection
3.1.4 piezoelectric vibration sensor element
piezoelectric sensor component whose resonance frequency or delay is used for measurement of vibration
3.1.5 dual mode sensor
piezoelectric sensor which is able to detect physical quantities from a change in resonance frequencies of two independent modes on a single piezoelectric plate
Note 1 to entry: In order to achieve improved precision and/or to eliminate undesired influence factors, sensor solutions are employed that utilize two or more modes. By evaluation of combinations of these modes’ sensitivities to various ambient conditions, on the one hand, improved detection sensitivity can be achieved, while, on the other hand, undesirable sensitivities can be reduced or eliminated.
3.1.6 differential sensor
piezoelectric sensor which is able to detect physical quantities from a change in resonance frequencies or delays of two independent and same micro-acoustic structures assembled on the same or different piezoelectric plates
3.1.7 multi-measurand sensor
piezoelectric sensor which is able to detect two or more different physical quantities from an analysis of different sensor responses
3.2 Symbols and units
The symbols and units given in IEC 63041 -1 apply.
Key points of the specification are identified in IEC 63041 -1 :201 7, Clause 5.
4.2 Conceptual diagrams of sensor types
In addition to the sensor types listed in IEC 63041 -1 :201 7, Clause 4, specific realizations are common for surface acoustic wave (SAW) sensors.
4.2.2 Conceptual diagram for sensor elements of SAW resonator type Figure 1 and Figure 2 show conceptual diagrams for resonator type SAW sensors. Figure 1 provides one resonance which is sensitive to undesirable influence factors such as frequency pulling. In the case of Figure 2, comprising e.g. a parallel connection of two resonators at different resonance frequencies, the sensor will be designed to have similar sensitivities of both resonators to such undesired effects and is therefore suitable to achieve higher accuracy with respect to the target measurand due to this compensation technique.IEC 63041-3 pdf download.