NFPA 318-2018 Standard for the Protection of Semiconductor Fabrication Facilities.
8.1 General. 8.1.1 Production and support equipment shall be designed and installed in accordance with Sections 8.3 through 8.4. (See Annex C.) 8.1.2 Vessels containing hazardous chemicals located in or connected to a workstation shall be protected from physical damage. 8.1.3 Chemicals or gas vessels shall be protected from seismic forces. 8.1.4 Workstations containing hazardous materials shall be provided with horizontal clearances of not less than 0.914 m (3 ft) where servicing is required, such as cylinder changes or hand pouring of chemicals. 8.1.5 Tools shall be designed to contain a release of HPM liquids as follows: (1) The containment system shall have the capacity to contain 110% volume of the largest container or anticipa‐ ted leak or spill, whichever is greater. (2) The containment system shall provide leak detection arranged to alarm at a constantly attended location. 8.2 Materials of Construction. 8.2.1 Tools shall be constructed of noncombustible materials, except as permitted by or Small parts within the tool such as knobs, buttons, electrical contacts, and terminal strips shall not be required to be of noncombustible materials.* Materials listed in accordance with the requirements contained in ANSI/FM 4910, Standard for Cleanroom Materials Flammability Test Protocol, or with the requirements contained in ANSI/UL 2360, Standard Test Method for Determining the Combusti‐ bility Characteristics of Plastics Used in Semiconductor Tool Construc‐ tion, for use without internal fre detection and suppression shall be permitted to be used as an acceptable alternative to noncombustible materials only where process concerns or process chemicals require alternatives. 8.2.2 Tools not meeting the requirements of 8.2.1 shall be provided with internal tool fre detection and suppression (fre sprinklers, approved gaseous agent fre suppression systems, or watermist) unless a risk assessment approved by the authority having jurisdiction concludes otherwise. The risk assessment shall include evaluation of approved engineering controls designed to prevent or limit fre damage and fre detection and suppression options. 8.3* Equipment Safety Systems and Interlocks. 8.3.1* Interlocks that automatically bring the tool to standby mode shall be interfaced with the tool’s operating system. 8.3.2 A local visual and audible alarm shall be provided to indicate activation of any interlock. Panel interlocks shall not require a local visual and audible alarm. 8.3.3 Each interlock and its operation shall be described in both the operations manual and the maintenance manual for the tool.NFPA 318 pdf download.